A THERMOELECTRIC INFRARED RADIATION SENSOR WITH MONOLITHICALLY INTEGRATED AMPLIFIER STAGE AND TEMPERATURE SENSOR

Authors
MULLER M BUDDE W GOTTFRIEDGOTTFRIED R HUBEL A JAHNE R KUCK H
Citation
M. Muller et al., A THERMOELECTRIC INFRARED RADIATION SENSOR WITH MONOLITHICALLY INTEGRATED AMPLIFIER STAGE AND TEMPERATURE SENSOR, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 601-605
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
54
Issue
1-3
Year of publication
1996
Pages
601 - 605
Database
ISI
SICI code
0924-4247(1996)54:1-3<601:ATIRSW>2.0.ZU;2-X
Abstract
We report on a monolithic integrated infrared sensor system consisting of a thermopile, a sensor measuring the chip temperature and an ampli fier stage fabricated in a CMOS process on SIMOX (separation by implan ted oxygen) wafers. A responsivity of 209 V W-1 and a normalized detec tivity D of 1.3 x 10(8) cm Hz(1/2) W-1 are found for thermopiles with single-crystalline p-Si/n-polysilicon thermocouples on silicon oxide/ silicon nitride membranes. A first analysis of the thermal influence o f the power consumed by the circuitry on the thermopile voltage indica tes that the sensor performance is not deteriorated by the integrated electronic circuitry.