LIGA MICROPUMP FOR GASES AND LIQUIDS

Authors
RAPP R SCHOMBURG WK MAAS D SCHULZ J STARK W
Citation
R. Rapp et al., LIGA MICROPUMP FOR GASES AND LIQUIDS, Sensors and actuators. A, Physical, 40(1), 1994, pp. 57-61
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
40
Issue
1
Year of publication
1994
Pages
57 - 61
Database
ISI
SICI code
0924-4247(1994)40:1<57:LMFGAL>2.0.ZU;2-A
Abstract
By combining the LIGA technique with processes used in the manufacture of micromembranes, micromembrane pumps have been built with pump cham bers 100 mu m in height and with pump membrane diameters between 2 and 5 mm. The pump case is made of gold, whereas the 2.7 mu m thin pump m embrane consists of titanium. The passive microvalves of the pump cons ist df patterned micromembranes arranged one over the other and made o f titanium and polyimide by use of thin-film techniques. The micropump has been tested so far with an external pneumatic drive. Both air and water have been pumped.