Y. Fukano et al., TIME EVOLUTION OF CONTACT-ELECTRIFIED ELECTRON DISSIPATION ON SILICON-OXIDE SURFACE INVESTIGATED USING NONCONTACT ATOMIC-FORCE MICROSCOPE, JPN J A P 1, 33(1B), 1994, pp. 379-382
Deposition and observation of contact-electrified electrons on thin si
licon oxide surface were performed separately and successfully investi
gated by the noncontact DC mode measurement of the induced electrostat
ic force with an atomic force microscope (AFM). It was found that the
dissipation of the contact-electrified electrons had three stages with
respect to time, which correspond to a stable state, an unstable stat
e and a trapped state at the charge trap site.