THE EFFECT OF SUBSTRATE SURFACE-TEMPERATURE ON THE MORPHOLOGY AND QUALITY OF DIAMOND FILMS PRODUCED BY THE OXYACETYLENE COMBUSTION METHOD

Citation
K. Bang et al., THE EFFECT OF SUBSTRATE SURFACE-TEMPERATURE ON THE MORPHOLOGY AND QUALITY OF DIAMOND FILMS PRODUCED BY THE OXYACETYLENE COMBUSTION METHOD, Thin solid films, 238(2), 1994, pp. 172-183
Citations number
21
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
238
Issue
2
Year of publication
1994
Pages
172 - 183
Database
ISI
SICI code
0040-6090(1994)238:2<172:TEOSSO>2.0.ZU;2-6
Abstract
Diamond films were synthesized using an oxyacetylene flame on a molybd enum substrate mounted on a water-cooled copper block. The morphology and quality of the synthetic diamond films produced depend on several factors including the substrate temperature, gas flow rates and their ratio, and substrate position. The substrate temperature profile was s hown to be influenced by the coolant flow rate, nozzle size, substrate position on the heat sink, substrate position in the combustion flame , and the total flow rate of mixed gas (acetylene and oxygen). In this paper, the effects of substrate temperature and nozzle size on the mo rphology and quality of diamond films are discussed. Fine-gage thermoc ouples were used to measure the temperature distribution in the substr ate during the process. Scanning electron microscopy of the produced d iamond films is used to show the variation of crystal morphology.