K. Bang et al., THE EFFECT OF SUBSTRATE SURFACE-TEMPERATURE ON THE MORPHOLOGY AND QUALITY OF DIAMOND FILMS PRODUCED BY THE OXYACETYLENE COMBUSTION METHOD, Thin solid films, 238(2), 1994, pp. 172-183
Diamond films were synthesized using an oxyacetylene flame on a molybd
enum substrate mounted on a water-cooled copper block. The morphology
and quality of the synthetic diamond films produced depend on several
factors including the substrate temperature, gas flow rates and their
ratio, and substrate position. The substrate temperature profile was s
hown to be influenced by the coolant flow rate, nozzle size, substrate
position on the heat sink, substrate position in the combustion flame
, and the total flow rate of mixed gas (acetylene and oxygen). In this
paper, the effects of substrate temperature and nozzle size on the mo
rphology and quality of diamond films are discussed. Fine-gage thermoc
ouples were used to measure the temperature distribution in the substr
ate during the process. Scanning electron microscopy of the produced d
iamond films is used to show the variation of crystal morphology.