FREQUENCY-DOMAIN (1KHZ-40GHZ) CHARACTERIZATION OF THIN-FILMS FOR MULTICHIP-MODULE PACKAGING TECHNOLOGY

Authors
LIU WT COCHRANE S WU XM SINGH PK ZHANG X KNORR DB MCDONALD JF RYMASZEWSKI EJ BORREGO JM LU TM
Citation
Wt. Liu et al., FREQUENCY-DOMAIN (1KHZ-40GHZ) CHARACTERIZATION OF THIN-FILMS FOR MULTICHIP-MODULE PACKAGING TECHNOLOGY, Electronics Letters, 30(2), 1994, pp. 117-118
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
2
Year of publication
1994
Pages
117 - 118
Database
ISI
SICI code
0013-5194(1994)30:2<117:F(COTF>2.0.ZU;2-Q
Abstract
Parallel plate capacitors for the broadband dielectric characterisatio n of both high (amorphous BaTiO3 and amorphous TaOx) and low (parylene ) dielectric constant thin films were fabricated at low temperature (< 200 degrees C). The dielectric constant and loss tangent were dermined through the measurement of C, G and the S parameters of the capacitor s. These thin film dielectrics exhibit no dispersion in the frequency range 1kHz-40GHz.