APPLICATION OF HIGH-POWER ION-BEAMS FOR TECHNOLOGY

Authors
REMNEV GE SHULOV VA
Citation
Ge. Remnev et Va. Shulov, APPLICATION OF HIGH-POWER ION-BEAMS FOR TECHNOLOGY, Laser and particle beams, 11(4), 1993, pp. 707-731
Citations number
61
Categorie Soggetti
Physics, Applied
Journal title
Laser and particle beams → ACNP
ISSN journal
02630346
Volume
11
Issue
4
Year of publication
1993
Pages
707 - 731
Database
ISI
SICI code
0263-0346(1993)11:4<707:AOHIFT>2.0.ZU;2-X
Abstract
Industrial applications of high-power ion beams, basically in the fiel d of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation , metal modification, and compounds production of thin films, are cons idered.