The use of CMOS technology in space needs a careful evaluation of the
latchup risk. The radiation tolerance is studied here for a standard 1
.0 mu m high density technology and its hardened variants. The interna
l currents and densities are read through dynamic two/three dimensiona
l device simulations, performed on a complete description of the CMOS
inverter cell and a simulated heavy ion strike. An evaluation of the c
apture cross section versus the ion energy is derived from the statist
istical distribution of ion tracks through the structure.