ON THE STRUCTURE OF SILICON AND ALUMINUM FILMS

Authors
Citation
D. Fatu et E. Segal, ON THE STRUCTURE OF SILICON AND ALUMINUM FILMS, Revue Roumaine de Chimie, 38(7), 1993, pp. 859-864
Citations number
10
Categorie Soggetti
Chemistry
Journal title
ISSN journal
00353930
Volume
38
Issue
7
Year of publication
1993
Pages
859 - 864
Database
ISI
SICI code
0035-3930(1993)38:7<859:OTSOSA>2.0.ZU;2-J
Abstract
An investigation concerning the orientation and surface defects of sil icon and aluminium thin films using optical microscopy and X-ray diffr action methods has been performed. The results show the change of the thin films properties according to the method applied to obtain them, thermal treatments and nature of the substratum. Conclusions concernin g the proper choice of the deposition conditions have been infered.