Mt. Mcclure et al., EFFECT OF NATIVE SIO2 LAYER ON THE NUCLEATION OF DIAMOND USING A COMBUSTION-FLAME, DIAMOND AND RELATED MATERIALS, 3(3), 1994, pp. 239-244
The effect of native oxide thickness on the nucleation of diamond was
investigated. The initial thickness of the native oxide on Si substrat
es was varied using three surface treatment methods: ultrasonic scratc
hing, HF acid etching, and a combination of the two. The oxide layer w
as also modified during the experiment by using a low O-2:C2H2 ratio p
regrowth treatment (R(f)=0.93, d=15 mm). The use of HF acid eliminated
the oxide layer within the detectable limits of the X-ray photoelectr
on spectroscopy analysis (about 3 Angstrom). A low gas ratio pregrowth
treatment process (oxygen-to-acetylene ratio R(f), set to 0.93) meant
that diamond crystals were formed after 30 s and a complete him in th
e center of the deposition area after 180 s. The low gas ratio pregrow
th treatment suppressed the formation of the oxide layer relative to s
tandard growth conditions (R(f)=0.97, d=10 mm). However, it was determ
ined that despite this low gas ratio treatment SiO2 formation was poss
ible inside the acetylene feather.