G. Gagnon et al., CHARACTERIZATION OF REACTIVELY EVAPORATED TIN LAYERS FOR DIFFUSION BARRIER APPLICATIONS, Journal of applied physics, 75(3), 1994, pp. 1565-1570
Thin TiN layers have been successfully produced on Si and SiO2 by reac
tive evaporation combined with rapid thermal annealing. Results of com
position, resistivity, and stress measurements on these layers are rep
orted. The TiN layers have a resistivity around 40 mu Omega cm and a h
igh stress of between 1 and 6 GPa. The composition ratio of nitrogen t
o titanium, measured by elastic recoil detection (ERD), combined with
time-of-flight, was found to vary between 0.8 and 1.0 depending on the
deposition conditions. In addition to the stoichiometry determination
, ERD also clearly shows the presence of a TiSi2 layer between the TiN
and the Si substrate. It is also shown that good TiN layers can be pr
oduced by reactive evaporation for nitrogen partial pressures between
1.0 and 2.0X10(-5) mbar and for titanium evaporation rates between 0.3
and 0.5 nm/s.