HIGHLY RELIABLE SILICON MICROMACHINED PHYSICAL SENSORS IS MASS-PRODUCTION

Authors
SASAYAMA T SUZUKI S TSUCHITANI S KOIDE A SUZUKI M NAKAZAWA T ICHIKAWA N
Citation
T. Sasayama et al., HIGHLY RELIABLE SILICON MICROMACHINED PHYSICAL SENSORS IS MASS-PRODUCTION, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 714-717
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
54
Issue
1-3
Year of publication
1996
Pages
714 - 717
Database
ISI
SICI code
0924-4247(1996)54:1-3<714:HRSMPS>2.0.ZU;2-8
Abstract
Silicon micromachined physical sensors such as silicon pressure sensor s and accelerometers are now in mass production in response to the str ong market demands. In the design of such sensors, it is most importan t to guarantee high reliability as well as low cost. To respond to the se demands for microsensors, the designs of device structure, producti on processes and packaging have been investigated in detail.