We present a theoretical analysis of the influence of surface roughnes
s on the atomic reflection from an evanescent wave mirror. In our calc
ulations we assume that light scattered at the rough dielectric surfac
e interferes with the evanescent wave, creating a rough potential that
scatters the atoms. We calculate the probability of diffuse reflectio
n and the momentum distribution of the scattered atoms with a statisti
cal model for the rough surface. The atomic reflection is diffuse rath
er than specular if the surface roughness is comparable to the wavelen
gth of the incident atoms. We discuss the spatial coherence of the ref
lected matter waves. We indicate how to generalize our treatment to th
e case of multilevel atoms.