PRECISION-MEASUREMENT OF THE SURFACE-ACOUSTIC-WAVE VELOCITY ON SILICON SINGLE-CRYSTALS USING OPTICAL-EXCITATION AND DETECTION

Surface acoustic wave (SAW) and pseudo surface acoustic wave (PSAW) pu lses were excited on the (001) and (111) planes of silicon single crys tals using ps laser pulses of 248-nm wavelength. An optical beam defle ction technique with a bandwidth of 600 MHz was developed for the dete ction of SAW with high spatial resolution. With this technique the SAW velocities on these silicon planes were determined with an accuracy o f 0.1% in various directions of propagation.