PRECISION-MEASUREMENT OF THE SURFACE-ACOUSTIC-WAVE VELOCITY ON SILICON SINGLE-CRYSTALS USING OPTICAL-EXCITATION AND DETECTION

Citation
H. Coufal et al., PRECISION-MEASUREMENT OF THE SURFACE-ACOUSTIC-WAVE VELOCITY ON SILICON SINGLE-CRYSTALS USING OPTICAL-EXCITATION AND DETECTION, The Journal of the Acoustical Society of America, 95(2), 1994, pp. 1158-1160
Citations number
14
Categorie Soggetti
Acoustics
ISSN journal
00014966
Volume
95
Issue
2
Year of publication
1994
Pages
1158 - 1160
Database
ISI
SICI code
0001-4966(1994)95:2<1158:POTSVO>2.0.ZU;2-1
Abstract
Surface acoustic wave (SAW) and pseudo surface acoustic wave (PSAW) pu lses were excited on the (001) and (111) planes of silicon single crys tals using ps laser pulses of 248-nm wavelength. An optical beam defle ction technique with a bandwidth of 600 MHz was developed for the dete ction of SAW with high spatial resolution. With this technique the SAW velocities on these silicon planes were determined with an accuracy o f 0.1% in various directions of propagation.