ANALYSIS OF NI TI MULTILAYERS BY X-RAY-DIFFRACTION/

The chemical modulation, structure and strain in Ni/Ti multilayer thin films are analyzed using X-ray diffraction theories. The repeat perio d of the multilayers used in this study ranges from 1.3 x 10(-9) to 12 .8 x 10(-9) m. The composition modulation is obtained by using a kinem atical theory of X-ray diffraction. Interplanar spacings and the strai n within each atomic layer are found by iteratively fitting the experi mental X-ray diffraction curves with the simulated one from a dynamica l theory of X-ray diffraction.