The chemical modulation, structure and strain in Ni/Ti multilayer thin
films are analyzed using X-ray diffraction theories. The repeat perio
d of the multilayers used in this study ranges from 1.3 x 10(-9) to 12
.8 x 10(-9) m. The composition modulation is obtained by using a kinem
atical theory of X-ray diffraction. Interplanar spacings and the strai
n within each atomic layer are found by iteratively fitting the experi
mental X-ray diffraction curves with the simulated one from a dynamica
l theory of X-ray diffraction.