ALLYL(BETA-DIKETONATO)PALLADIUM(II) COMPLEXES AS PRECURSORS FOR PALLADIUM FILMS

Authors
YUAN Z PUDDEPHATT RJ
Citation
Z. Yuan et Rj. Puddephatt, ALLYL(BETA-DIKETONATO)PALLADIUM(II) COMPLEXES AS PRECURSORS FOR PALLADIUM FILMS, Advanced materials, 6(1), 1994, pp. 51-54
Citations number
14
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
6
Issue
1
Year of publication
1994
Pages
51 - 54
Database
ISI
SICI code
0935-9648(1994)6:1<51:ACAPFP>2.0.ZU;2-Q
Abstract
Chemical vapor deposition (CVD) of palladium is at present not used co mmercially, despite the widespread use of palladium films in electroni cs and data storage, because suitable precursors are not available. Ne w palladium precursors, allyl(beta-diketonato)palladium(II) complexes (see Figure) are reported, along with the conditions required for the formation of pure palladium films by CVD.