(ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS

Authors
TILMANS HAC LEGTENBERG R SCHURER H IJNTEMA DJ ELWENSPOEK M FLUITMAN JHJ
Citation
Hac. Tilmans et al., (ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 41(1), 1994, pp. 4-6
Citations number
15
Categorie Soggetti
Engineering, Eletrical & Electronic",Acoustics
Journal title
IEEE transactions on ultrasonics, ferroelectrics, and frequency control → ACNP
ISSN journal
08853010
Volume
41
Issue
1
Year of publication
1994
Pages
4 - 6
Database
ISI
SICI code
0885-3010(1994)41:1<4:(COEDV>2.0.ZU;2-S
Abstract
The design, fabrication and performance of vacuum-encapsulated electro statically driven polysilicon resonating beams, 210-510 mum long, 100 mum wide, and 1.5 mum thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality fac tors of 18 000 were measured below 0.01 mbar.