TRIBOLOGICAL PROPERTIES OF TITANIUM NITRIDE FILMS PREPARED BY DYNAMICION-BEAM MIXING METHOD

Authors
NAGASAKA H CHAYAHARA A FUJII K
Citation
H. Nagasaka et al., TRIBOLOGICAL PROPERTIES OF TITANIUM NITRIDE FILMS PREPARED BY DYNAMICION-BEAM MIXING METHOD, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 121(1-4), 1997, pp. 279-282
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
121
Issue
1-4
Year of publication
1997
Pages
279 - 282
Database
ISI
SICI code
0168-583X(1997)121:1-4<279:TPOTNF>2.0.ZU;2-J
Abstract
Titanium nitride (TiN) films have been developed by a dynamic ion beam mixing (DM) process, which combines Ti vapor deposition with simultan eous nitrogen ion beam irradiation, Tribological properties of DM TiN film on martensitic stainless steel have been investigated concerning their application to dry gas seal materials for compressors and turbin es, The microhardness, adhesion force, wear resistance and frictional coefficient properties of DM TiN film were investigated and compared t o conventional hard materials such as are ion plating (IP) TIN film, c hromium carbide (Cr3C2) thermal spray coating and tungsten carbide (WC ) hard alloy. The results show wear resistance and friction in TiN fil ms prepared by the DM process to be superior to that in conventional h ard materials.