P. Hedenqvist et al., MECHANICAL AND TRIBOLOGICAL CHARACTERIZATION OF LOW-TEMPERATURE DEPOSITED PVD TIN COATINGS, Surface & coatings technology, 63(2), 1994, pp. 115-122
Three potential processes for TiN deposition at low temperatures (high
current density plasma beam evaporation (200-320-degrees-C), high cur
rent density plasma beam activated electron beam evaporation (220-degr
ees-C) and high current density plasma beam assisted sputtering (220-d
egrees-C)) are evaluated with respect to the resulting surface topogra
phy, hardness, scratch resistance and abrasive wear resistance of the
deposited coatings. TiN coatings deposited using three different proce
sses operating at standard temperature (450-degrees-C) were used as re
ferences. It is shown that it is possible to obtain low-temperature Ti
N coatings with retained properties (hardness, scratch and abrasion re
sistance) as compared with TiN coatings produced at standard temperatu
res. The results also indicate that, at low temperatures, activated ev
aporation seems to yield coatings with better mechanical and tribologi
cal properties than sputtering. An important observation is that the p
erformance ranking of the investigated coatings differs with the param
eters measured. This, in turn, implies that several methods must be ut
ilized for evaluation of a candidate coating-substrate composite for a
given application.