OPTICALLY TRANSPARENT INDIUM-TIN-OXIDE (ITO) OHMIC CONTACTS IN THE FABRICATION OF VERTICAL-CAVITY SURFACE-EMITTING LASERS

Authors
MATIN MA JEZIERSKI AF BASHAR SA LACKLISON DE BENSON TM CHENG TS ROBERTS JS SALE TE ORTON JW FOXON CT REZAZADEH AA
Citation
Ma. Matin et al., OPTICALLY TRANSPARENT INDIUM-TIN-OXIDE (ITO) OHMIC CONTACTS IN THE FABRICATION OF VERTICAL-CAVITY SURFACE-EMITTING LASERS, Electronics Letters, 30(4), 1994, pp. 318-320
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
4
Year of publication
1994
Pages
318 - 320
Database
ISI
SICI code
0013-5194(1994)30:4<318:OTI(OC>2.0.ZU;2-5
Abstract
The authors report what they believe to be the first successful fabric ation of an InGaAs/GaAs vertical-cavity surface emitting laser (VCSEL) using optically transparent indium-tin-oxide (ITO) ohmic contacts to p- and n-type regions of the laser. Threshold current densities J(th) are similar to those lasers fabricated from the same wafer using conve ntional ohmic contacts.