LIGA AND RELATED TECHNOLOGIES FOR INDUSTRIAL APPLICATION

The advance of microsystem technology is seen to consist of two phases : first, the development of microstructure technologies including a va riety of microcomponents, and secondly, the integration of components to microsystems. For industrial implementation it is of vital importan ce to develop flexible fabrication schemes for microcomponents as well as manufacturing methods for hybrid microsystems, i.e., the combinati on of different technologies to one system. The LIGA technique is well suited for mass fabrication and for hybridization as well. Examples o f a small-scale fabrication of 'pure' LIGA components and hybrid compo nents are given.