A numerical analysis of the deep-level transient spectroscopy of the Z
nSe-GaAs heterojunction based on rigorously solving the Poisson equati
on and taking account of the interfacial band discontinuity is present
ed. By combining the numerical analysis with the experimental measurem
ents, properties of the interfacial defects are revealed. It is found
that there are donor-like interfacial defects at the ZnSe-GaAs interfa
ce with the energy level being located at about 0.5 eV below the condu
ction band minimum of GaAs, and with an electron capture cross section
of 2.5 x 10(-16) cm(2). The areal density of interfacial defects is d
etermined to be 1 x 10(12) cm(2) for ZnSe grown on GaAs substrate trea
ted with S2Cl2.