LOW-CROSSTALK AND LOW-LOSS WAVE-GUIDE CROSSINGS ON INP WITH SMALL DIMENSIONS

With the increasing scale of integration, resulting in a higher on-chi p complexity, waveguide crossings with good performance are becoming i ncreasingly important. Worst-case paths contain a high number of cross ings, depending on the number of channels being processed, in switchin g matrices [1], multiwavelength add drop filters [2] (up to 15), and o ptical cross-connects [3]. Crossings with very low crosstalk and loss can be realized in fiber-matched waveguide structures as used in lithi um niobate or silica-based technology [4, 5]. In highly integrated sem iconductor devices, crossings may contribute significantly to the loss and crosstalk performance. In this paper we present the results of a series of experiments for the design of high-performance semiconductor waveguide crossings.