OPTICAL-PROPERTIES OF THE INTEGRATED INFRARED-SENSOR

To construct an all-silicon wavelength-tuneable infrared (IR) sensor b y means of micromachining methods, not only the mechanical characteris tics of silicon, but also the optical ones, must be considered. As pur e silicon is transparent to a very high degree in the near-infrared re gion (1.1-11 mu m), it is a common material for use in IR optical comp onents like IR windows, IR lenses or IR prisms. This article will give an overview on how the optical properties of the integrated IR sensor depend on the materials used and technological process applied. In do ing so, the theoretical limits and measured data will be compared; the common ground and differences between them have been investigated and will be discussed.