B. Demauduit et al., IDENTIFICATION OF EOR DEFECTS DUE TO THE REGROWTH OF AMORPHOUS LAYERSCREATED BY ION-BOMBARDMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 190-194
In this paper TEM investigations have been carried out on typical EOR
defects found in Ge-amorphized (001) wafers (Ge-->Si, 150 keV, 2X10(15
) ions/cm(2)) after thermal annealing (RTA, 1000 degrees C, 10 s). The
se defects consist of medium sized (10-50 nm) dislocation loops that h
ave been characterized by conventional electron microscopic techniques
. Most of them (similar to 75%) are circular faulted Frank loops with
b = a/3[111] vectors. The remaining (similar to 25%) loops are perfect
elongated hexagon-shaped loops: they have nearly (111) habit planes,
with b = a/2[101] vectors. Hence, it is possible to deduce from only o
ne TEM image the number of Si atoms available in the loops as well as
the density of the loops for different implantation or annealing condi
tions. This is needed for optimization of process conditions.