PRECIPITATION STUDY IN THIN-LAYERS BY GRAZING SMALL-ANGLE SCATTERING OF X-RAYS

Studies of thin layer by small-angle scattering of X-rays in the trans mission mode give weak intensities because the X-ray path is short. Gr azing-incidence X-ray scattering circumvents this difficulty for the a nalysis of a thin layer deposited on a substrate. Furthermore, for a b ulk sample, grazing incidence is the only way to study the surface lay er, and the penetration depth can be controlled by the incidence angle of the X-ray beam. In this study, we report on krypton and xenon bubb les which are precipitated in an aluminium single crystal and also in polycristaline deposited layers of metals. These inclusions are produc ed by ion implantation at room temperature. They are found solid by hi gh-angle diffraction. Comparison between high-angle diffraction and sm all-angle scattering under grazing incidence lead to a better knowledg e of these specific precipitated systems.