TANTALUM NITRIDE FILMS AS RESISTORS ON CHEMICAL-VAPOR-DEPOSITED DIAMOND SUBSTRATES (VOL 73, PG 5208, 1993)

Authors
KATZ A PEARTON SJ NAKAHARA S BAIOCCHI FA LANE E KOVALCHICK J
Citation
A. Katz et al., TANTALUM NITRIDE FILMS AS RESISTORS ON CHEMICAL-VAPOR-DEPOSITED DIAMOND SUBSTRATES (VOL 73, PG 5208, 1993), Journal of applied physics, 75(5), 1994, pp. 2736-2736
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
75
Issue
5
Year of publication
1994
Pages
2736 - 2736
Database
ISI
SICI code
0021-8979(1994)75:5<2736:TNFARO>2.0.ZU;2-7