G. Willeke et P. Fath, MECHANICAL WAFER ENGINEERING FOR SEMITRANSPARENT POLYCRYSTALLINE SILICON SOLAR-CELLS, Applied physics letters, 64(10), 1994, pp. 1274-1276
A concept for the realization of semitransparent bifacially active hig
hly efficient and light weight crystalline silicon solar cells is pres
ented. The concept is based on the preparation of perpendicular V-groo
ves in silicon blanks by mechanical abrasion using a dicing saw and be
veled blades. Holes of variable diameter are formed automatically in t
he processing step, which provide a connection between the passivated
phosphorus doped front and back side emitters. A maximum bulk-emitter
distance of approximately 30 mum has been realized in 200 mum thick st
ructures which should result in highly efficient solar cell devices ev
en in small grain low quality polycrystalline material. The partial tr
ansparency of the presented solar cell structure opens the way for new
applications (crystalline Si photovoltaic windows, etc.). The feasibi
lity of the mechanical grooving process has been demonstrated on Wacke
r SILSO cast silicon. Double-side V-grooved structures (distance betwe
en grooves 90 and 140 mum, bevel angle 35-degrees-) with hole diameter
s in the range 10-70 mum, corresponding to a transmittance of up to 30
% in the visible, have been prepared with excellent uniformity and mec
hanical stability over a large area (5 x 5 cm2) . An average total ref
lectance in the range 500-1000 nm of R(av) = 0.9% has been measured on
a structure with a geometrical hole fraction of 1.7% after growth of
a 1170 angstrom thick layer of thermal oxide. This SILSO structure had
an effective silicon thickness of 120 mum, whereas the absorptance sp
ectrum near the band edge was similar to a 5.5 mm thick nongrooved sil
icon wafer, indicating the excellent light trapping obtained.