BETTER CERAMIC SUBSTRATES THROUGH ZEOLITES

A novel synthetic route for fabricating dense aluminosilicate-based ce ramics at relatively low temperatures (less-than-or-equal-to 1000-degr ees-C) is described. The method involves ion exchange of an appropriat e zeolite powder, followed by fabrication and sintering, to form a den se ceramic. Anorthite, cordierite- and beta-spodumene-based ceramic su bstrates with attractive physical properties for microelectronic packa ging are obtained using these unusual precursors. A brief overview on the property requirements for substrates used in microelectronic packa ging is outlined at the beginning of the article.