ON THE VANDERPAUW METHOD OF RESISTIVITY MEASUREMENTS

The Van der Pauw method is one of the most effective and widely used m ethods of the four-probe mode of determining the resistivity of materi als in the form of thin films. The right version of the suggested equa tions for the correction function that fit the given graph was confirm ed by numerical calculations. Then, the equation was experimentally ve rified by designing samples of different shapes and contact configurat ions. For easy, fast and accurate estimation of the correction factor, tables of the numerical values are given with steps of 0.1 and 1.0 fo r the range of R'/R'' ratio from 1 to 200. It is recommended that thes e tables be used rather than an inaccurate estimation from the graph o r recalculation of the factor.