DEPOSITION OF CARBONACEOUS FILMS ONTO INTERNAL WALLS OF TUBES

Deposition of carbonaceous films onto inner walls of small diameter tu bes has been studied. A small size radio frequency plasma jet system w ith nozzles made from tungsten or graphite has been installed coaxiall y inside the tube. Changes in H-2 + CH4 (+O2) as compositions affected strongly the coating conditions on inner walls of the tube. The growt h rate distributions of the microcrystalline primarily sp3 bonded film along the substrate area indicate an important role of the afterglow and peripheral regions of the plasma jet. Films were deposited onto Si , Mo, W, Cu, and Fe surfaces. At particular conditions incorporation o f the substrate material into the growing films was observed. Contamin ation of films from the W nozzle was detectable only when oxygen was a dmixed in the working gas.