R. Moene et al., EVALUATION OF ISOTHERMAL CHEMICAL-VAPOR INFILTRATION WITH LANGMUIR-HINSHELWOOD TYPE KINETICS, Journal of the Electrochemical Society, 141(1), 1994, pp. 282-290
A model has been developed for the mathematical description of isother
mal chemical vapor infiltration (ICVI) processes. Three types of adsor
ption of the reactive species are incorporated into the kinetic equati
ons: weak associative adsorption, strong associative adsorption, and d
issociative adsorption. The kinetic models are based on Langmuir-Hinsh
elwood equations. Weak associative adsorption of the reactive species
gives rise to an exponentially shaped final deposition profile, wherea
s strong associative and dissociative adsorption result in a sigmoidal
ly shaped deposition profile in the pore. This profile originates from
a shift in deposition mechanism from a layered growth (weak associati
ve adsorption) to a moving front growth (strong associative and dissoc
iative adsorption). For weakly adsorbing reactive species, the residua
l porosity of a preform can be decreased by lowering the process press
ure. With strong associative or dissociative adsorption, the reverse e
ffect can be found at the investigated process conditions. This effect
is caused by the change in reaction-rate dependence of the concentrat
ion inside the pore. Application of the concept of a generalized Thiel
e modulus shows that for all investigated kinetic models the residual
porosity of densified preforms is smaller than 1% when the Thiele modu
lus is kept below 0.02. For weak associative adsorption, this region c
an be achieved by lowering the pressure. With strong associative and d
issociative adsorption of the active species, it is realized by an inc
rease in concentration and pressure.