Recently, we achieved reproducible and controllable contact electrific
ation with a modified atomic force microscope (AFM). In the present pa
per, we report on the application of this novel microscopic method to
investigate dissipation and spatial distribution of contact-electrifie
d charges on SrTiO3 (STO) thin films with large dielectric constants.
A charge dot with a Full width at half-maximum as small as 70 nm has b
een deposited using this technique. We also succeeded in depositing tw
o adjacent dots with arbitrary charge signs. Thus, its potential capab
ility for application to charge storage was clarified experimentally.