COMPUTATIONAL STUDIES ON LIFETIME OF PRIMARY ELECTRONS IN A BUCKET-TYPE ION-SOURCE WITH GRID CURRENT

Authors
Citation
S. Ido et H. Hasebe, COMPUTATIONAL STUDIES ON LIFETIME OF PRIMARY ELECTRONS IN A BUCKET-TYPE ION-SOURCE WITH GRID CURRENT, JPN J A P 2, 33(3A), 1994, pp. 120000380-120000382
Citations number
4
Categorie Soggetti
Physics, Applied
Volume
33
Issue
3A
Year of publication
1994
Pages
120000380 - 120000382
Database
ISI
SICI code
Abstract
We developed a calculation code to trace electron orbits with collisio ns between electrons and argon gas atoms in a bucket-type ion source w ith grid current. By supplying grid current, the lifetime of a primary electron was extended and the number of electrons that escape from th e plasma grid was reduced. This paper discusses the relationship betwe en grid current and lifetime of primary electrons.