S. Ido et H. Hasebe, COMPUTATIONAL STUDIES ON LIFETIME OF PRIMARY ELECTRONS IN A BUCKET-TYPE ION-SOURCE WITH GRID CURRENT, JPN J A P 2, 33(3A), 1994, pp. 120000380-120000382
We developed a calculation code to trace electron orbits with collisio
ns between electrons and argon gas atoms in a bucket-type ion source w
ith grid current. By supplying grid current, the lifetime of a primary
electron was extended and the number of electrons that escape from th
e plasma grid was reduced. This paper discusses the relationship betwe
en grid current and lifetime of primary electrons.