N. Nadaud et al., SINTERING AND ELECTRICAL-PROPERTIES OF TITANIA-CONTAINING AND ZIRCONIA-CONTAINING IN2O3-SNO2 (ITO) CERAMICS, Journal of the American Ceramic Society, 77(3), 1994, pp. 843-846
The deposition rate and film quality of In2O3-SnO2 (ITO) transparent e
lectrodes processed by sputtering are improved when using dense sputte
ring targets. Unfortunately, ITO ceramics do not sinter easily. It is
shown that addition of TiO2 (<1 wt%) to ITO greatly increases densific
ation without degrading electrical properties of sputtered films. The
influence of ZrO2 and SiO2 was also investigated.