SINTERING AND ELECTRICAL-PROPERTIES OF TITANIA-CONTAINING AND ZIRCONIA-CONTAINING IN2O3-SNO2 (ITO) CERAMICS

Authors
NADAUD N NANOT M BOCH P
Citation
N. Nadaud et al., SINTERING AND ELECTRICAL-PROPERTIES OF TITANIA-CONTAINING AND ZIRCONIA-CONTAINING IN2O3-SNO2 (ITO) CERAMICS, Journal of the American Ceramic Society, 77(3), 1994, pp. 843-846
Citations number
14
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of the American Ceramic Society → ACNP
ISSN journal
00027820
Volume
77
Issue
3
Year of publication
1994
Pages
843 - 846
Database
ISI
SICI code
0002-7820(1994)77:3<843:SAEOTA>2.0.ZU;2-E
Abstract
The deposition rate and film quality of In2O3-SnO2 (ITO) transparent e lectrodes processed by sputtering are improved when using dense sputte ring targets. Unfortunately, ITO ceramics do not sinter easily. It is shown that addition of TiO2 (<1 wt%) to ITO greatly increases densific ation without degrading electrical properties of sputtered films. The influence of ZrO2 and SiO2 was also investigated.