CESIUM GUN FOR A SCANNING ION MICROPROBE

Authors
VOLKOV SS DOROSHINA NV SERGACHEV AA TOLSTOGUZOV AB FETISOV SA
Citation
Ss. Volkov et al., CESIUM GUN FOR A SCANNING ION MICROPROBE, Instruments and experimental techniques, 36(5), 1993, pp. 793-795
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
36
Issue
5
Year of publication
1993
Part
2
Pages
793 - 795
Database
ISI
SICI code
0020-4412(1993)36:5<793:CGFASI>2.0.ZU;2-B
Abstract
This paper describes a cesium gun for secondary-ion mass spectrometry. The gun includes a cesium ion source with surface ionization, a doubl e-lens ion-optics system, a binary deflecting system for the ion beam, and an objective lens. The maximum ion energy is 15 keV. The minimum diameter of the ion beam is 30 mum, current density is over 8 mA/cm2, and the maximum current through the sample is 1.5 muA.