LARGE-NUMERICAL-APERTURE MICROLENS FABRICATION BY ONE-STEP ETCHING AND MASS-TRANSPORT SMOOTHING

Authors
LIAU ZL MULL DE DENNIS CL WILLIAMSON RC WAARTS RG
Citation
Zl. Liau et al., LARGE-NUMERICAL-APERTURE MICROLENS FABRICATION BY ONE-STEP ETCHING AND MASS-TRANSPORT SMOOTHING, Applied physics letters, 64(12), 1994, pp. 1484-1486
Citations number
20
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
64
Issue
12
Year of publication
1994
Pages
1484 - 1486
Database
ISI
SICI code
0003-6951(1994)64:12<1484:LMFBOE>2.0.ZU;2-U
Abstract
Precision f/1 microlenses have been fabricated in GaP by smoothing a m ultiple-mesa structure etched with a designed width and length variati on. High-resolution lithography and ion-beam-assisted etching were use d for mesa definition and resulted in accurate lens profiles after mas s-transport smoothing at 900-1070-degrees-C. This much simplified fabr ication technique is highly promising for efficient, diffraction-limit ed micro-optical elements.