This letter describes a novel technique of diffracted beam glancing an
gle x-ray diffraction by which depth profiles of stresses and transfor
med phases in structures like implanted materials can be determined. A
n important feature is that this method may be applied successfully in
a standard powder diffractometer. It is shown that, beside the well-k
nown incident beam glancing angle method which usually requires rather
sophisticated equipment with parallel beam optics combined with more
intense x-ray sources, diffracted beam glancing angle x-ray diffractio
n can be applied as well.