THE DEPOSITION OF ALUMINUM NITRIDE THIN-FILMS BY METAL-ORGANIC CVD - AN ALTERNATIVE PRECURSOR SYSTEM

Authors
JONES AC AULD J RUSHWORTH SA WILLIAMS EW HAYCOCK PW TANG CC CRITCHLOW GW
Citation
Ac. Jones et al., THE DEPOSITION OF ALUMINUM NITRIDE THIN-FILMS BY METAL-ORGANIC CVD - AN ALTERNATIVE PRECURSOR SYSTEM, Advanced materials, 6(3), 1994, pp. 229-231
Citations number
22
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
6
Issue
3
Year of publication
1994
Pages
229 - 231
Database
ISI
SICI code
0935-9648(1994)6:3<229:TDOANT>2.0.ZU;2-L