EFFECT OF SUBSTRATES ON THE GROWTH AND PROPERTIES OF LINBO3 FILMS BY THE SOL-GEL METHOD

Thin films of LiNbO3 Were fabricated on sapphire(012), MgO(001), and S i(111) substrates by the sol-gel process. Under optimized conditions, films deposited onto sapphire(012) were epitaxially grown. Preferred o rientations, however, were not observed in the films on MgO(001) and S i(111) by x-ray diffraction measurements. Morphology of the epitaxial films on sapphire(012) was examined by scanning electron microscopy, w hich indicated that the films were smooth and had a pore-free surface. Electrical and optical measurements on the epitaxial films revealed t hat the properties of the films were very similar to those of the sing le crystalline LiNbO3, while films deposited onto Si(111) did not.show any orientational behaviors. The highest quality films with epitaxy w ere obtained only on sapphire(012). The remaining substrates appeared to be not suitable for growing epitaxial LiNbO3 films by the sol-gel m ethod.