PRECISE WAVELENGTH CONTROL FOR DFB LASER-DIODES BY NOVEL CORRUGATION DELINEATION METHOD

Authors
MUROYA Y NAKAMURA T YAMADA H TORIKAI T
Citation
Y. Muroya et al., PRECISE WAVELENGTH CONTROL FOR DFB LASER-DIODES BY NOVEL CORRUGATION DELINEATION METHOD, IEEE photonics technology letters, 9(3), 1997, pp. 288-290
Citations number
8
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
9
Issue
3
Year of publication
1997
Pages
288 - 290
Database
ISI
SICI code
1041-1135(1997)9:3<288:PWCFDL>2.0.ZU;2-G
Abstract
Precise wavelength control of a multiple-wavelength DFB laser-diode (L D) array was achieved using weighted-dose allocation variable-pitch EB -lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 mu m lambda/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the waveleng th was as low as 0.37 nm over 2-in wafers.