METAL-SEMICONDUCTOR-METAL ULTRAVIOLET PHOTODETECTORS USING 6H-SIC

Metal-semiconductor-metal (MSM) UV photodetectors on n-type 6H-SiC epi taxial wafers have been reported for the first time, in which no p-n j unctions or ohmic contacts are needed. Peak response wavelength at 340 nm and dark current of 1 pA at 20-V bias voltage have been measured. The photodetectors also show fair response to 193-nm wavelength deep U V light.