Silicon is considered as a basic material for development of microsens
ors and microtechnologies. This is because of its remarkable electrica
l and mechanical properties. Silicon films with amorphous or polycryst
alline texture as well as monocrystalline layers are now available and
are well suited or applications. On the other hand, silicon can be us
ed as a low cost substrate to growth heterogeneous systems, including
for example SiGe/Si-III-V or II-VI compounds or organic materials on s
ilicon. Different studies in material science must be emphasized for d
eveloping microsensors and microsystems. Particularly, because of the
size reduction of the components in integrated systems, minimization o
f defects and strain at the interfaces is required.