ATOMIC-SCALE SIMULATION OF MICROTECHNOLOG IES

Various atomic scale simulation techniques are presented and positione d with respect to classical microscopic and macroscopic models. The ro le of atomic scale simulations both on practical and fundamental level s, as intermediate models, is discussed. Applications of atomic scale simulations are described in detail in two pertinent areas of microtec hnology development : the thin multilayer growth and the wet anisotrop ic etching. Some illustrative examples are reported in each case.