SILICON MICROMACHINING

Authors
DANEL JS CAMON H
Citation
Js. Danel et H. Camon, SILICON MICROMACHINING, Onde electrique, 74(2), 1994, pp. 21-27
Citations number
NO
Categorie Soggetti
Telecommunications,"Engineering, Eletrical & Electronic
Journal title
Onde electrique → ACNP
ISSN journal
00302430
Volume
74
Issue
2
Year of publication
1994
Pages
21 - 27
Database
ISI
SICI code
0030-2430(1994)74:2<21:SM>2.0.ZU;2-G
Abstract
Single-crystal silicon is being increasingly employed in new micro-mec hanical devices. This paper describes some of the processing technique s which are specific to the obtention of such structures as : chemical etching, dry etching, electro-chemical etching, epitaxy, bonding.