ELECTRICAL CHARGE AND HF CONCENTRATION-EFFECT ON POROUS SILICON FORMATION

Authors
DIFRANCIA G SALERNO A
Citation
G. Difrancia et A. Salerno, ELECTRICAL CHARGE AND HF CONCENTRATION-EFFECT ON POROUS SILICON FORMATION, Journal of the Electrochemical Society, 141(3), 1994, pp. 689-690
Citations number
9
Categorie Soggetti
Electrochemistry
Journal title
Journal of the Electrochemical Society → ACNP
ISSN journal
00134651
Volume
141
Issue
3
Year of publication
1994
Pages
689 - 690
Database
ISI
SICI code
0013-4651(1994)141:3<689:ECAHCO>2.0.ZU;2-X
Abstract
Porous silicon (PS) samples fabricated using different electrochemical conditions are studied. A correlation between film porosity and the e nergy E, provided to the silicon/HF system, is found. The dependence o f the etched mass on E is also investigated. A maximum for the porosit y is found to exist. The conditions for fabricating PS samples emittin g in the visible region are given.