CONTRIBUTIONS OF DIFFERENT GENERATIONS OF RECOILS TO SPUTTERING BY BACKSCATTERED LIGHT-IONS

Authors
AIELLO D PLETNEV VV FALCONE G FORLANO L
Citation
D. Aiello et al., CONTRIBUTIONS OF DIFFERENT GENERATIONS OF RECOILS TO SPUTTERING BY BACKSCATTERED LIGHT-IONS, Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics, 16(1), 1994, pp. 75-88
Citations number
17
Categorie Soggetti
Physics
Journal title
Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics → ACNP
ISSN journal
03926737
Volume
16
Issue
1
Year of publication
1994
Pages
75 - 88
Database
ISI
SICI code
0392-6737(1994)16:1<75:CODGOR>2.0.ZU;2-9
Abstract
Neumann's expansion of the integral form of the Boltzmann transport eq uation is used to estimate the contribution of different generations o f recoils to sputtering. By considering the flux generated by backscat tered ions it is shown that primary recoils are, in the region of low energy (few keV), the main contribution to sputtering.