E. Sheka et al., SURFACE VIBRATIONS OF SILICON-NITRIDE - INELASTIC NEUTRON-SCATTERING STUDY AND COMPUTER MODELING, Journal of electron spectroscopy and related phenomena, 67(1), 1994, pp. 133-139
In practice, the chemical formula Si3N4 represents a family of materia
ls in which Si3N4 constitutes the major phase. The properties of each
family member depends, in part, on its microstructure developed during
manufacturing. In this paper, properties of five family members diffe
ring in their method of manufacture are considered microscopically fro
m the surface chemistry viewpoint. To solve the problem we have studie
d the vibrational spectra and have performed semiempirical quantum che
mical modeling of surface properties depending on the manufacturing wa
ys.