The interface models were founded, and the expressions of the relation
between Doppler broadening S-parameter and the implanted energy of po
sitrons were got based on the diffusion equation of positrons. Interfa
ces formed between Al overlayer and the (110) surface of GaAs were stu
died with slow positron beam. We found the system of Al/GaAs interface
s could be well described by the perfectly absorbing linear interface
model. From the results fitted by this model, we obtained the relation
between the S-parameter of the interface and the annealing temperatur
es or the overlayer thickness. The microstructure of interfaces and it
s dynamical characters were discussed.