A study has been made of how treatment in the plasma of a hydrogen glo
w discharge affects the photoluminescence of test samples of several t
ypes at a temperature of 78 K. The samples were layers of several comp
ositions grown by vapor-phase epitaxy from metal-organic compounds. Th
e layers consisted of undoped Al0.3Ga0.7As; silicon-doped Al0.28Ga0.72
As (n approximately 10(17) cm-3); undoped GaAs; undoped multilayer str
uctures with several GaAs/Al0.23 Ga0.77As quantum wells, with widths o
f 2, 3.6, 5.4, and 23 nm; and undoped GaAs/AlGaAs double heterostructu
res with separate electronic and optical confinement with a 20-nm acti
ve region. The hydrogenation reduces the photoluminescence intensity o
f undoped Al0.3Ga0.7As and GaAs layers, while it intensifies this lumi
nescence in the case of silicon-doped Al0.28Ga0.72As. The photolumines
cence intensity of GaAs/AlGaAs quantum wells is increased sharply by t
he treatment in a hydrogen plasma. The observed effect is seen most vi
vidly in the case of narrow quantum wells. It stems from a passivation
by hydrogen of radiationless defects at heterojunctions. After hydrog
enation of a double heterostructure with separate confinement containi
ng transition layers with a composition gradient near the heterojuncti
ons, the photoluminescence spectrum of the GaAs active region becomes
sharply narrower.