PASSIVATION OF CRYSTALLINE SILICON-CARBIDE IN A HYDROGEN PLASMA

Authors
KONSTANTINOV AO KONSTANTINOVA NS KONKOV OI TERUKOV EI IVANOV PA
Citation
Ao. Konstantinov et al., PASSIVATION OF CRYSTALLINE SILICON-CARBIDE IN A HYDROGEN PLASMA, Semiconductors, 28(2), 1994, pp. 209-210
Citations number
4
Categorie Soggetti
Physics, Condensed Matter
Journal title
Semiconductors → ACNP
ISSN journal
10637826
Volume
28
Issue
2
Year of publication
1994
Pages
209 - 210
Database
ISI
SICI code
1063-7826(1994)28:2<209:POCSIA>2.0.ZU;2-O